| 摘要 |
<P>PROBLEM TO BE SOLVED: To inexpensively manufacture an optical element having excellent environmental resistance, reliability and long-term stability and to increase a filling factor (a line/pitch ratio). <P>SOLUTION: A pattern in a rugged pattern opposite to a target fine rugged structure is formed by using resin projection stripes arranged on a substrate surface; and the recesses of the pattern are filled with a dielectric layer by a film forming method. The resin is removed but may remain depending on the material. <P>COPYRIGHT: (C)2008,JPO&INPIT |
