| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck device capable of adjusting the temperature of a tabular specimen mounted on an electrostatic chuck part accurately.SOLUTION: An electrostatic chuck device includes an electrostatic chuck part using a ceramic sintered compact as a formation material, where one principal surface is a mounting surface for mounting a tabular specimen, and a control part for controlling the voltage applied to an electrostatic attraction electrode. Temperature of the tabular specimen is controlled by controlling the voltage thereby changing the contact area of the tabular specimen and the mounting surface.SELECTED DRAWING: Figure 1 |
