Apparatus and method of testing a substrate using a supporting nest and testing probes

摘要

Embodiments of the invention may provide a testing apparatus that is used to test solar cells or other electronic devices. The testing apparatus may comprise a substantially flat support that is configured to support a substrate or other device that is to be electrically tested and a plurality of testing probes. The support comprises a plurality of through holes, each suitable for the insertion of a corresponding testing probe, to allow each probe to make contact with a testing area formed on the substrate. The testing apparatus may comprise a suction device that is associated or associable with the support, and is able to exert a holding force on the substrate that counteracts the thrusting force exerted by the testing probes.

主权项

1. An apparatus for testing a characteristic of a substrate, comprising:
an actuator; a supporting nest having a surface for supporting a substrate thereon, wherein the supporting nest comprises:
a plurality of testing holes; anda plurality of suction holes, wherein the plurality of testing holes and the plurality of suction holes are formed through the surface of the supporting nest; anda suction line connected to a suction device, the suction line including a plurality of suction portions connecting the suction line to the plurality of suction holes, wherein each testing hole is at least partially surrounded by a different suction portion; and a plurality of testing probes that are supported by one or more movable arms that are coupled to the actuator, wherein each of the testing probes are positioned so that each testing probe is configured to pass through at least a portion of a corresponding testing hole of the plurality of testing holes when the actuator moves the one or more movable arms relative to the supporting nest, wherein
the plurality of testing probes consists of all testing probes that are configured to be moved through the surface of the supporting nest; andthe plurality of testing holes consists of all holes that the corresponding testing probes of the plurality of testing probes are configured to be moved through when the corresponding testing probes are moved through the surface of the supporting nest.