| 发明名称 | Electrostatic clamp, lithographic apparatus and method | ||
| 摘要 | An electrostatic clamp (21) configured to hold an object, the electrostatic clamp comprising an electrode (24), a resistive portion (23) formed from a resistive material located on the electrode, and a dielectric portion (22) formed from a dielectric material located on the resistive portion. | ||
| 申请公布号 | US9429857(B2) | 申请公布日期 | 2016.08.30 |
| 申请号 | US201314395979 | 申请日期 | 2013.03.19 |
| 申请人 | ASML Netherlands B.V. | 发明人 | Van Der Wilk Ronald;Schmitz Roger Wilhelmus Antonius Henricus;Notenboom Arnoud Willem;Will Manon Elise |
| 分类号 | G03B27/52;G03F7/20;H01L21/683 | 主分类号 | G03B27/52 |
| 代理机构 | Sterne, Kessler, Goldstein & Fox P.L.L.C. | 代理人 | Sterne, Kessler, Goldstein & Fox P.L.L.C. |
| 主权项 | 1. A clamp configured to hold an object, the clamp comprising: an electrode to which a voltage may be applied in order to secure the object to the clamp; and a cooling fluid conduit having an inlet and an outlet, wherein the clamp is provided with a heater configured to locally heat part of the cooling fluid conduit, and wherein the heater is configured to locally heat part of the cooling fluid conduit that is only adjacent to the inlet, thereby reducing a temperature gradient between fluid adjacent to the inlet and fluid that is approaching the outlet. | ||
| 地址 | Veldhoven NL | ||