| 摘要 |
PURPOSE:To prevent the change of properties of an optical crystal and to make the manufacture of optical devices of high performance possible by bringing the working surface of an optical crystal body in tight contact with a flat plate which hampers the percolation of the external diffusion material in the optical crystal and applying a heat treatment thereto. CONSTITUTION:Ti for formation of waveguides is deposited by a lift-off method on a thin plate 4 of LiNbO3 disposed on a quartz holder 3 in a diffusion furnace consisting of a quartz tube 1 heated to 1,000 deg.C by an electric furnace 2. An external diffusion material (Li2O) is beforehand vapor-deposited on the holder 3 and when it is heated in tight contact with the surface of a sample 4, the external diffusion material evaporated from the holder 3 side fills the microclearances and this expedites the external diffusion stop of the sample 4. Thereby, the change in the properties of an optical crystal 4 is prevented and the manufacture of the high-performance optical devices is made possible. |
