摘要 |
PURPOSE:To enhance optoelectric conversion efficiency at a thin film solar cell consisting of a transparent substrate, a transparent conductive film, a semiconductor layer and an electrode bya method wherein thickness of the current collecting electrode to be provided adjoining to the transparent conductive film is made as the same with or thinner than thickness of the semiconductor layer or the transparent conductive film. CONSTITUTION:The transparent conductive film 2 of tin oxide, indium, etc., is adhered on the transparent substrate 1 of glass, etc., a comb-shaped current collecting electrode 3 manufactured with silver is formed thereon, and the whole surface is covered with the semiconductor layer 4 of amorphous silicon, etc. In this constitution, the layer 4 is constituted of the laminated body of the P type layer, the I type layer, and the N type layer from the injecting side of light 6, and the Al electrode 5 is ahered on the layer 4. When thickness of the transparent conductive film 2 is about 3,000Angstrom , and thickness of the semiconductor later 4 is about 6,000Angstrom , thickness of the current collecting electrode is made as the same with the thickness of them or made as 200- being thinner than thickness of them. Moreover thickness of the semiconductor layers 7, 8 at the neighborhood of the current collecting electrode 3 are made as the same withthe semiconductor layer 4. Accordingly shunt resistance of the current collecting electrode 4 is enlarged, and efficiency is enhanced. |