| 摘要 |
PURPOSE:To raise efficiency of utilizing the inside space and make substrate operation easy by arranging annular electrodes axially on the outer circumference of a reaction tube and connecting them alternately and connecting a high frequency electric power between two groups of electrodes and removing electrodes from the inside of the tube. CONSTITUTION:Each electrode 12 (12-1, 12-2) is supported by spacers 15 and electricity conductive bolts 14 on an insulation plate 13. The electrode 12 has an annular section that is slidably inserted into a reaction tube 1 and legs that protrude over both ends of the diameter. The spacers 15 are inserted to give a specified distance among them onto the two of four bolts 14 that are diagnoally positioned. Since there is no electrode that is a source of generating impurities in the reaction tube 1 and, furthermore, plasma is generated on the whole inside of the tube, the rate of utilization of the inner space is improved. Further, if the electric field distribution is fine-adjusted by making the distances among electrodes variable, the state of plasma generation can be kept at its best. It is very easy to handle the substrate because there is no plasma generation in the tube. |
