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发明名称
MEASUREMENT OF DIFFUSION IN TRANSVERSE DIRECTION IMPURITY
摘要
申请公布号
JPH0278220(A)
申请公布日期
1990.03.19
申请号
JP19880230603
申请日期
1988.09.14
申请人
MATSUSHITA ELECTRIC WORKS LTD
发明人
SUGINO SATOSHI;SHINMYO YOSHIHIKO
分类号
H01L21/22;H01L21/66
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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