| 摘要 |
PURPOSE:To improve the oxidation resistance and durability of the carbon member by specifying the porosity and impurity content of a vitreous carbon material obtained by carbonizing and calcining a resin, etc., and in which crystallites are not detected by X-ray diffraction. CONSTITUTION:A thermosetting resin such as furan resin is formed into a desired shape and cured at a low heating rate to obtain a cured body. The cured body is then carbonized and calcined at the heating rate of about 1 deg.C/hr in an inert atmosphere (e.g. inert atmosphere free of oxygen and consisting of >=1 kind selected from He, Ar, N2, H2, etc., reduced pressure, vacuum or atmosphere isolated from air). The obtained calcined product is purified at about 2300 deg.C to obtain a vitreous carbon material having 0.02-0.2% porosity, in which crystallites are not detected by X-ray diffraction and contg. <=5ppm impurities. A carbon member for the plasma device is then produced from this carbon material. |
