发明名称 Transport system for conveying workpiece between first and second media
摘要 A lock chamber for conveying a workpiece from one medium (U0) into another medium (U7) which comprises a lever (11) acting as a transport system and pivotably mounted in the chamber on one side. With lock gates (5a, 5b) moves aside the lever (11) can swing out by a required degree into the respective media (U7, U0). With the design of the transport system as unilaterally mounted levers (11), the volume of the lock chamber is largely independent of the trajectory of the lever and the volume can be minimized (FIG. 1).
申请公布号 US5017073(A) 申请公布日期 1991.05.21
申请号 US19890434417 申请日期 1989.11.09
申请人 BALZERS AKTIENGESELLSCHAFT 发明人 STRASSER, GREGOR;ZOEHRER, GERALD;SCHERTLER, ROMAN;FISCHER, HEINRICH
分类号 B23Q7/00;C23C14/56;G11B7/26;H01L21/677 主分类号 B23Q7/00
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