| 摘要 |
PURPOSE:To miniaturize a device by introducing the emitted light of a laser beam source to a beam splitter again with a reflecting mirror, introducing it to an optical system for signal detection via the beam splitter, and monitoring the emitted light quantity of the laser beam source. CONSTITUTION:The reflecting mirror 6 on which the emitted light of the laser beam source 1 separated with the beam splitter 5 is reflected is provided, and the emitted light of the laser beam source 1 is introduced again to the beam splitter 5 with the reflecting mirror 6, and it is introduced to the optical systems 10-15 for signal detection via the beam splitter 5, and the emitted light quantity of the laser beam source 1 is monitored in the optical systems 10-15. In such a way, a laser emitted beam reflected on the beam splitter 5 is folded at the reflecting mirror 6, and monitored light is detected in the optical systems 10-15. Therefore, the reflecting mirror 6 can be formed integrally with the emission plane of the beam splitter 5, which requires no waste space. Thereby, the miniaturization of the device can be attained. |
