| 摘要 |
<p>PURPOSE:To prevent the generation of dropping, cracking, etc., of an object to be attracted, and enable a specimen to be released immediately after the attractive force is extinguished. CONSTITUTION:A specimen stand 1 wherein conductor 2 is covered with an insulating film 3 is arranged at the nearly central part on a cooling plate 12, and fixed to the cooling plate 12 by a specimen stand presser 11. A base member 5 is arranged in a space 22 formed in the cooling plate 12. Lift pins 4, 4,... disposed upright in the end portion of the base member 5 are inserted from the space 22 into holes 21, 21,... formed in the specimen stand 1. The base member 5 is retained by an upper side retaining rod 61, which is connected with a lower side retaining rod 62, via a spring 8. A retaining plate 25 formed at the lower end of the lower side retaining rod 62 is connected with the cooling plate 12 by using a bellows 24. The retaining plate 25 is connected with an elevating shaft 27 wherein a load cell 9 connected with a stepping motor 26 is arranged. The load cell 9 is connected with a control equipment 10 in which an amplifier 101, an operator 102 and a driver 103 are installed.</p> |
