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发明名称
摘要
申请公布号
JP2560418(B2)
申请公布日期
1996.12.04
申请号
JP19880141020
申请日期
1988.06.08
申请人
MITSUBISHI MATERIALS CORP
发明人
KIDA MICHIO;SAHIRA TATEAKI
分类号
C30B15/02;C30B15/10;H01L21/208;(IPC1-7):C30B15/10
主分类号
C30B15/02
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