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发明名称
摘要
申请公布号
JP2559373(B2)
申请公布日期
1996.12.04
申请号
JP19860163619
申请日期
1986.07.14
申请人
HITACHI LTD
发明人
MINAGAWA SHIGEKAZU;NAKATSUKA SHINICHI;SATO MAKOTO
分类号
H01L21/308;H01L21/306;H01S5/00;(IPC1-7):H01S3/18
主分类号
H01L21/308
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