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发明名称
摘要
申请公布号
JP2575789(B2)
申请公布日期
1997.01.29
申请号
JP19880078897
申请日期
1988.03.31
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
MAEHARA YOICHIRO;ATSUMI KOICHIRO
分类号
H01L21/60;G02F1/133;G02F1/1345;G09F9/00;(IPC1-7):H01L21/60
主分类号
H01L21/60
代理机构
代理人
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