The present invention concerns a cantilever arrangement for scanning a surface (16). This arrangement comprises a first cantilever (11) having a first probe (14) and a second cantilever (13) having a second probe (15). Both cantilevers (11, 13) are mechanically coupled such that the second cantilever (13) follows the movement of the first cantilever (11), i.e. the deflection of the first cantilever (11) defines the deflection of the second cantilever (13).
申请公布号
WO9734122(A1)
申请公布日期
1997.09.18
申请号
WO1996IB00209
申请日期
1996.03.13
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION;BINNIG, GERD, KARL;BRUGGER, JUERGEN;HAEBERLE, WALTER;ROHRER, HEINRICH;VETTIGER, PETER
发明人
BINNIG, GERD, KARL;BRUGGER, JUERGEN;HAEBERLE, WALTER;ROHRER, HEINRICH;VETTIGER, PETER