发明名称 CANTILEVER STRUCTURES
摘要 The present invention concerns a cantilever arrangement for scanning a surface (16). This arrangement comprises a first cantilever (11) having a first probe (14) and a second cantilever (13) having a second probe (15). Both cantilevers (11, 13) are mechanically coupled such that the second cantilever (13) follows the movement of the first cantilever (11), i.e. the deflection of the first cantilever (11) defines the deflection of the second cantilever (13).
申请公布号 WO9734122(A1) 申请公布日期 1997.09.18
申请号 WO1996IB00209 申请日期 1996.03.13
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION;BINNIG, GERD, KARL;BRUGGER, JUERGEN;HAEBERLE, WALTER;ROHRER, HEINRICH;VETTIGER, PETER 发明人 BINNIG, GERD, KARL;BRUGGER, JUERGEN;HAEBERLE, WALTER;ROHRER, HEINRICH;VETTIGER, PETER
分类号 G01B21/30;G01B5/28;G01B7/34;G01N37/00;G01Q60/32;G01Q70/10;G11B9/00;G11B9/14;G12B1/00;(IPC1-7):G01B7/34 主分类号 G01B21/30
代理机构 代理人
主权项
地址