Electrostatic capacitive acceleration sensor

摘要

The acceleration sensor uses an even displacement to detect an acceleration from the electrostatic capacitance between a fixed electrode (15, 16) and a movable electrode (14) which is shifted through a force of inertia of the acceleration. A sensor unit (2) is manufactured from a silicon substrate and includes the movable electrode and the fixed electrode. A pair of protection substrates (3, 4) are joined on opposed sides of the sensor unit. An integrated circuit (6) is provided for detecting the acceleration from the electrostatic capacitance of the sensor unit. Connection electrodes (20) are provided for connecting the sensor unit with the integrated circuit, and are arranged on the side of the sensor unit which faces one of the protection substrates. Electrode holes (8) are arranged in the corresponding protection substrate. The electrode holes are formed in the substrate at positions which correspond to the connection electrodes. The integrated circuit is fixed on the protection substrate, in which the electrode holes are formed. Connection pins of the integrated circuit engage in the electrode holes and are electrically connected with the connection electrodes of the sensor unit.