发明名称 Lens system, in particular projection lens system in semiconductor lithography
摘要 In the case of a lens system, in particular a projection lens system in semiconductor lithography, with a plurality of optical elements, such as lenses, which are mounted in mounts, the mounts being connected to one another, if appropriate by means of adjusting rings, at least one inner mount of an optical element which is intended for removal and/or later fitting is connected to an outer mount by means of a three-point mounting.
申请公布号 US2002001142(A1) 申请公布日期 2002.01.03
申请号 US20010874929 申请日期 2001.06.05
申请人 CARL-ZEISS-STIFTUNG 发明人 OSTERRIED KARLFRID
分类号 G02B7/02;G03B21/14;G03F7/20;(IPC1-7):G02B7/02 主分类号 G02B7/02
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