| 摘要 |
A chemical mechanical polishing apparatus has a platen, a polishing sheet that is wider than the substrate extending between the a first reel and a second reel, and a motor to drive at least one of the first and second reels to move the polishing sheet in a linear direction across the top surface of the platen during polishing. The polishing sheet is driven alternately in opposing directions to switch between transferring the polishing sheet from the first reel to the second reel, and from the second reel to the first reel.
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