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发明名称
Aufdruckprägesystem
摘要
申请公布号
DE102005001916(A1)
申请公布日期
2005.08.04
申请号
DE200510001916
申请日期
2005.01.14
申请人
KOMAG INC
发明人
SAITO TOSHIYUKI MAX
分类号
G11B5/84;C23C16/00;G11B5/86;G11B7/26;H01L21/68;(IPC1-7):G11B5/84
主分类号
G11B5/84
代理机构
代理人
主权项
地址
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