发明名称 POLISHING DEVICE, AND ITS POLISHING TOOL
摘要 PROBLEM TO BE SOLVED: To maintain the flatness of a polishing surface of a grinding wheel even when the grinding wheel is in a wet condition by a liquid supplied during the polishing operation. SOLUTION: A polishing device is provided with a grinding wheel 13, a pedestal 15 to support the grinding wheel 13, and a holding member to hold a work 4 to be polished, and a surface to be polished is polished to be flat and mirror surface while sliding the surface to be polished of the work 4 to be polished while pressing against a grinding surface of the grinding wheel 13. The grinding wheel 13 is fixed to the pedestal 15 in a wet condition.
申请公布号 JPH11333705(A) 申请公布日期 1999.12.07
申请号 JP19990074127 申请日期 1999.03.18
申请人 EBARA CORP 发明人 HIROKAWA KAZUTO;HIYAMA HIROKUNI;WADA TAKETAKA;MATSUO NAONORI
分类号 B24B37/12;H01L21/304 主分类号 B24B37/12
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