METHOD FOR PRODUCING GROUP III NITRIDE CRYSTAL

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a group III nitride crystal having a higher crystal growth rate. SOLUTION: The method for producing a group III nitride crystal includes a process for removing moisture by heat-treating a reaction vessel 21 beforehand, a melt formation process for forming a melt 1 containing at least a group III element and a catalyst around a seed crystal 2 in the reaction vessel 21 from which moisture is removed, and a crystal growth process for growing a group III nitride crystal 4 on the seed crystal 2 by supplying a nitrogen-containing substance 3 to the melt 1. COPYRIGHT: (C)2010,JPO&INPIT