Package on package structure and fabrication method thereof

摘要

A method for fabricating a POP structure is disclosed. First, a first package is provided, which has: a dielectric layer; a stacked circuit layer embedded in the dielectric layer and exposed from upper and lower surfaces of the dielectric layer; a plurality of conductive posts and a semiconductor chip disposed on the upper surface of the dielectric layer and electrically connected to the stacked circuit layer; and an encapsulant formed on upper surface of the dielectric layer for encapsulating the semiconductor chip and the conductive posts and having a plurality of openings for exposing top ends of the conductive posts. Then, a second package is disposed on the encapsulant and electrically connected to the conductive posts. The formation of the conductive posts facilitates to reduce the depth of the openings of the encapsulant, thereby reducing the fabrication time and increasing the production efficiency and yield.

主权项

1. A method for fabricating a POP structure, comprising the steps of:
providing a first package fabricated by:
providing a carrier having opposite third and fourth surfaces and forming a first resist layer on the fourth surface of the carrier, wherein the first resist layer has a plurality of openings for exposing portions of the carrier;forming a plurality of first circuits in the openings of the first resist layer;forming a second resist layer on the first resist layer and the first circuits, wherein the second resist layer has a plurality of openings for exposing the first circuits;forming a plurality of second circuits in the openings of the second resist layer such that the first circuits and the second circuits form a stacked circuit layer;removing the first resist layer and the second resist layer;forming a dielectric layer on the fourth surface of the carrier so as to encapsulate the first circuits and the second circuits, wherein the second circuits are exposed from a second surface of the dielectric layer;removing a portion of the carrier to form a cavity in the carrier so as to expose the first circuits from a first surface of the dielectric layer and forming a plurality of conductive posts from a remaining portion of the carrier, wherein the conductive posts are electrically connected to the first circuits;disposing a semiconductor chip on the first surface of the dielectric layer and electrically connecting the semiconductor chip to the stacked circuit layer;forming an encapsulant on the first surface of the dielectric layer for encapsulating the semiconductor chip and the conductive posts; andforming a plurality of openings in the encapsulant for exposing top ends of the conductive posts; and disposing a second package on the encapsulant and electrically connecting the second package to the conductive posts.