Semiconductor element, semiconductor device including the same, and method for manufacturing semiconductor element

摘要

To provide a semiconductor element that can have the high adhesion between a substrate made of an oxide or the like and a metal film, a semiconductor element includes a substrate made of an oxide, a semiconductor element structure provided on an upper surface of the substrate, and a metal film provided on a lower surface of the substrate, in which the metal film contains nanoparticles made of an oxide.

主权项

1. A semiconductor element comprising:
a substrate made of an oxide; a semiconductor element structure grown on an upper surface of the substrate; and a metal film provided on a lower surface of the substrate, wherein the metal film contains nanoparticles made of an oxide.