Menetelmä ja järjestelmä mikromekaanisten elektrodien välisen etäisyyden sähköiseksi säätämiseksi

摘要

The invention relates to a method for controlling by electrical means the interelectrode distance of such a micromechanical electrode structure [(7,8)] in which at least one electrode [(7)] is attached elastically suspended on the surrounding structure, whereby the elastic properties of each electrode and the electrical control applied over the electrodes determine the interelectrode distance. According to the invention, the distance between the electrodes [(7,8)] is controlled by controlling the AC control current passing via the electrodes [(7,8)].