| 摘要 |
PROBLEM TO BE SOLVED: To recognize and comprehend the accommodation state of thin substrates by utilizing a part of a series of conventional operations of a cover opening/closing device, without having special operation performed by a transfer robot. SOLUTION: A cover opening/closing device 10 opens or closes a lid 72 of a thin substrate accommodation cassette 70 which has thin substrates 1 accommodated in a multi-stage accommodation part 71, and has a cover holder 13 for holding the cover 72. The cover 72 is opened by shifting the cover holder 13 which holds the cover 72. The cover holder 13 is provided with an image-pickup means 21, which picks up image of a thin substrate accommodation state inside the cassette 70 when the cover holder 13 is shifted. |
