| 摘要 |
PURPOSE:To measure a material accurately, by preparing a reference body, which has a thermal expansion rate equal to or approximating that of a material to be measured in the range of a measuring temperature and has known dimensions at a reference temperature, and by obtaining the temperature deviation and by correcting dimensions of the material to be measured. CONSTITUTION:A reference body is prepared which has a thermal expansion rate equal to or approximating that of a material to be measured in the range of a measuring temperature and has known dimensions at a reference temperatur. A slider 3 which is movable freely in X and Y directions by a pair of stanchion 1 and a cross member 2 is provided with a probe shaft 4 which is movable freely in the Z direction, and a probe 5 is fitted to one end of the probe shaft 4. The probe 5 is movable freely in X, Y, and Z directions, and the quantity of movement of a detector for detecting the quantity of movement in each direction is sent to a data processing device 6. A material 8 to be measured and a reference body 9 are put on a measure table 7. Respective sides of the reference body 9 are parallel with X, Y, and Z directions. The reference body 9 is measured, and a temperature deviation is obtained. The material 8 is measured, and the measure result is corrected by this temperature deviation to obtain dimensions at a reference temperature. |
