发明名称 Blade cover in a cutting apparatus
摘要 Disclosed is a blade cover in a cutting apparatus comprising a chuck table for holding a workpiece to be cut and cutting means for cutting the workpiece, which comprises a spindle having a rotary blade detachably attached thereto and a spindle housing for rotatably holding the spindle. The blade cover is fixed to the spindle housing on its front side, and it comprises: a rear nozzle assembly for flushing water to the rotary blade on its rear side; a front nozzle assembly for flushing water to the rotary blade on its front side; and blade detecting means for detecting the condition of the rotary blade. The front nozzle assembly is adapted to be put selectively in operative or inoperative position, and the blade detecting means is adapted to be put selectively in operative or inoperative position in unison with the front nozzle assembly. With this arrangement the rotary blade can be changed readily.
申请公布号 US6010396(A) 申请公布日期 2000.01.04
申请号 US19980118061 申请日期 1998.07.17
申请人 DISCO CORPORATION 发明人 OHMIYA, NAOKI
分类号 B23D59/00;B24B27/06;B24B55/04;B28D5/00;B28D5/02;B28D7/00;H01L21/301;(IPC1-7):B24B55/02 主分类号 B23D59/00
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