METHOD OF DIFFUSING IMPURITY,申请号JP19930035081-传众专利搜索

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发明名称	METHOD OF DIFFUSING IMPURITY
摘要
申请公布号	JPH06252077(A)	申请公布日期	1994.09.09
申请号	JP19930035081	申请日期	1993.02.24
申请人	NEC CORP	发明人	TANIGAWA AKIO
分类号	H01L21/26;H01L21/265;H01L21/268;H01L21/326;(IPC1-7):H01L21/26	主分类号	H01L21/26
代理机构		代理人
主权项
地址

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