发明名称 Halbleiteranordnung mit Metallschichten
摘要 A semiconductor device, including a nickel layer formed on a semiconductor substrate and a solder layer formed on the nickel layer, and a method of manufacturing such a device are disclosed. The percent ratio of an X-ray diffraction peak intensity of the (200) plane of the nickel layer to that of the (111) plane of the nickel layer is not less than 10%. The nickel layer is sputtered in a condition which a pressure of an argon discharge gas is at least 15 mTorr. The solder layer includes at least tin and lead, and the amount of tin is not more than 30% by weight. The adhesive strength of the resultant semiconductor device is strong. <IMAGE>
申请公布号 DE69122435(T2) 申请公布日期 1997.02.13
申请号 DE1991622435 申请日期 1991.05.22
申请人 NIPPONDENSO CO., LTD., KARIYA, AICHI, JP 发明人 KONDO, ICHIHARU, NAGOYA-CITY, AICHI-PREF., JP;INAGUMA, YOSHIAKI, NAGOYA-CITY, AICHI-PREF., JP;SAKAMOTO, YOSHITSUGU, KARIYA-CITY, AICHI-PREF., JP
分类号 C23C14/06;C23C14/14;H01L21/28;H01L21/285;H01L21/52;H01L23/482;H01L23/492;H01L29/43 主分类号 C23C14/06
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