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发明名称
ALUMINUM NITRIDE SINTERED BODY AND PROCESS FOR PRODUCING THE SAME
摘要
申请公布号
EP0507961(B1)
申请公布日期
1998.01.14
申请号
EP19910918635
申请日期
1991.10.29
申请人
SUMITOMO ELECTRIC INDUSTRIES, LTD.
发明人
YAMAKAWA, AKIRA;SOGABE, KOUITI;MIYAKE, MASAYA;SHIMODA, KOHEI
分类号
C04B35/581;(IPC1-7):C04B35/581;H01L23/15
主分类号
C04B35/581
代理机构
代理人
主权项
地址
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