| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain an electron microscope by which an X-ray analysis in a plurality of visual fields is performed automatically, which omits a complicated operation and whose operability and operating efficiency are enhanced, by a method wherein a plurality of points to be analyzed are stored on the side of the electron microscope and on the side of a video camera system and a movement to an arbitrary point to be analyzed and a dislocation in the movement are corrected automatically. SOLUTION: A visual field in which an X-ray analysis is performed is fecthed by a camera control unit 2, image data in which the center of its image is used as a measuring point is stored in a microcomputer 5 so as to be used as an image A, and also the position of a sample in an electron microscope 3 is stored simultaneously. Then, the position of the sample in the measuring point of a selected visual field is fetched into a television camera 1 and the unit 2 by a sample control unit 7 so as to be used as an image B, a place with which the image A agrees in the image B is specified, an electron beam is deflected to its coordinates by an electron beam control unit 9, a beam spot is applied, and the X-ray analysis is started. As a result, a plurality of visual fields can be analyzed automatically and continuously in such a way that an observing and photographing operation and the X-ray analysis are not repeated alternately by the microscope 3.</p> |
