METHOD AND APPARATUS FOR RECOVERING RARE GAS

摘要

A method of and an apparatus for recovering a rare gas, capable of efficiently recovering a rare gas discharged from equipment using the rare gas, stably supplying the rare gas of a predetermined purity to the same equipment and reducing the consumption of the rare gas, wherein, when the rare gas in an exhaust gas discharged from the rare gas-using equipment operated under vacuum is recovered, the introducing of the exhaust gas into a recovery system is switched to/from the discharging of the same gas to an exhaust system under a vacuum condition, this switching operation being carried out in accordance with the concentration of the impurity components contained in the exhaust gas and the operational condition of the rare gas-using equipment.