| 摘要 |
PROBLEM TO BE SOLVED: To provide a linear guide device with long life capable of smoothly guiding a moving stage hardly having a posture-change even when the moving stage is moved to either ends of stroke in a moving stage linearly guided by frictional drive of a driven member and a friction member of ultrasonic motor provided on the moving stage. SOLUTION: A driven member 3 is provided on a moving stage 2 guided by a guide member 4 and a friction member 8 of an ultrasonic motor 6 is attached to one side of the driven member 3 and a rotatable wheel 9 is attached to the other side to pinch the driven member 3. In whichever position of stroke the moving stage 2 ray be, an accurate positioning is possible. |
