| 摘要 |
PROBLEM TO BE SOLVED: To provide an LSI failure analyzer which displays the estimated result of failure points of a logic LSI in a manner to overlap on a mask layout, and utilizes a critical area of mask layout data as information for specifying the failure points. SOLUTION: The critical area as an index of how easily the failure takes place is calculated with reference to design data and information on a foreign matter distribution at a production line. The calculated result is displayed while a mask layout display and failure point candidates are related to each other, thereby enabling supporting limiting the failure candidates.
|
