| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor-measuring device having a mechanism for restraining the biased wear, and preventing position deviation from occurring easily regarding the electric connection and opening between a prober and a test head. SOLUTION: In the prober 11, a travel control stage 111 for placing a wafer WF and a probe card 112, and a circuit substrate 113 for signal relay are arranged to test a probe via a tester body 13 where a test system related to the generation and analysis of a test signal is constructed, and a test head 12 for processing the transmission of a signal. The test head 12 descends and ascends while being horizontal essentially directly above the probe 11 by an elevation mechanism 14, and is electrically connected and opened. The elevation mechanism 14 has a thread formation region S that is engaged with a support section 122 of a support rod 141 and the test head 12 at both ends, and is elevated accurately by rotary control at the side of the support rod 141.
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