Sensor apparatus and cantilever for it

摘要

A magnetically excited, resonant cantilever sensor apparatus has a cantilever as the transducer element. A static magnetic field is directed in the plane of the cantilever(s) cooperating with a current loop in/on the latter. Orienting the magnetic field along or perpendicular to the cantilever axis and controlling the current apprpriately allows for selective excitation of resonance or non-resonance modes and/or in a self-oscillation mode. The deflection of the cantilever is detected using piezoresistive or magnetic readout. The apparatus may be used as gas sensor, scanning force microscope, mechanical filter, temperature sensor or the like.