| 摘要 |
PROBLEM TO BE SOLVED: To hold slurry to be discharged out of a polishing pad by a slurry hold body once at the time of polishing by forming at least a part of a polishing face side where an object to be polished is polished by the slurry hold body. SOLUTION: A slurry hold body 14 is provided in a recessed part 13 to hold slurry once and efficiently in a polishing pad 11 provided with the recessed part 13 on a polishing face 12 side where an object to be polished is polished. In this case, the slurry hold body 14 is made of, for example, a material in which multiporous resin and fiberlike resin are accumulated in layers and a material in which fiberlike resin or pleatlike resin is densely provided in a bottom part of the recessed part 13, and the recessed part 13 is formed toward an outer peripheral direction from a central part of the polishing pad 11. |
