发明名称 |
Apparatus for transporting substrates under controlled environment |
摘要 |
<p>Substrate conveyor, consisting of a chamber (1) with a controlled atmosphere in its inner cavity (2), and a shell (4) with opening partitions (8,9) covering its two main surfaces (5,6). The shell has an additional side opening (7) with a cover through which substrates (3) can be introduced and removed. The two partitions can be fitted to either of the chamber's main surfaces, depending on the position of the substrate's active face, and seal when closed. The atmosphere inside the chamber is controlled by a pump (12) with its suction side (12a) connected to the inner cavity to allow a vacuum to be created.</p> |
申请公布号 |
EP1589565(B1) |
申请公布日期 |
2007.01.03 |
申请号 |
EP20050290812 |
申请日期 |
2005.04.13 |
申请人 |
ALCATEL |
发明人 |
BERNARD, ROLAND;KAMBARA, HISANORI;RIVAL, JEAN-LUC;LE GUET, CATHERINE |
分类号 |
B65G49/07;H01L21/00;H01L21/673 |
主分类号 |
B65G49/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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