发明名称 Method for testing semiconductor components using bonded electrical connections
摘要 A method for testing a semiconductor component includes the steps of bonding an interconnect to the component to form bonded electrical connections, applying test signals through the bonded electrical connections, and then separating the interconnect from the component. The bonding step can be performed using metallurgical bonding, and the separating step can be performed using solder-wettable and solder non-wettable metal layers on the interconnect or the component. During the separating step the solder-wettable layers are dissolved, reducing adhesion of the bonded electrical connections, and permitting separation of the component and interconnect. The interconnect includes interconnect contacts configured for bonding to, and then separation from component contacts on the components. A system includes the interconnect, an alignment system for aligning the substrate to the interconnect, a bonding system for bonding the component to the interconnect, and a heating system for heating the component and the interconnect for separation.
申请公布号 US7271611(B2) 申请公布日期 2007.09.18
申请号 US20070698678 申请日期 2007.01.26
申请人 MICRON TECHNOLOGY, INC. 发明人 FARNWORTH WARREN M.;TUTTLE MARK
分类号 G01R31/26 主分类号 G01R31/26
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