| 摘要 |
PROBLEM TO BE SOLVED: To provide a crystal film forming device capable of improving crystal quality and to provide a gas blow board used for it. SOLUTION: In the crystal film forming device comprising a heating plate 2 and a gas blow board 3 arranged on the heating plate 2 and opposite to the heating plate 2, the gas is blown off to the heating plate 2 so that the crystal may be formed on the heating plate 2. The gas blow board 3 has a cooling pipe 8 provided with an inflow portion 8a for making refrigerant which absorbs the heat flow into the center side from the outside of the gas blow board 3, and an outflow portion 8b which makes the refrigerant flow out from the center side to the outside while being connected with the inflow portion 8a. A contact area S1 wherein the refrigerant comes into contact with the inflow portion 8a is smaller than a contact area S2 wherein the refrigerant comes into contact with the outflow part 8b. COPYRIGHT: (C)2008,JPO&INPIT
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