发明名称 |
Method for wafer bonding (A1, In, Ga)N and Zn(S, Se) for optoelectronic applications |
摘要 |
A method for producing a wafer bonded structure between (Al, In, Ga)N and Zn(S,Se). A highly reflective and conductive distributed Bragg reflector (DBR) for relatively short optical wave lengths can be fabricated using Zn(S,Se) and MgS/(Zn, Cd)Se materials. Using wafer bonding techniques, these high-quality DBR structures can be combined with a GaN-based optical device structure.
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申请公布号 |
US7344958(B2) |
申请公布日期 |
2008.03.18 |
申请号 |
US20050175761 |
申请日期 |
2005.07.06 |
申请人 |
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA;UNIVERSITAET BREMEN;JAPAN SCIENCE AND TECHNOLOGY AGENCY |
发明人 |
MURAI AKIHIKO;MCCARTHY LEE;MISHRA UMESH K.;DENBAARS STEVEN P.;KRUSE CARSTEN;FIGGE STEPHAN;HOMMEL DETLEF |
分类号 |
H01L21/30;H01L21/46;H01L33/00 |
主分类号 |
H01L21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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