| 摘要 |
The present invention relates to an auto shutter for a substrate processing apparatus, comprising: a rotational shaft unit; a door unit coupled to the rotational shaft unit and opening and closing a transfer space part in which a substrate is transferred according to rotation of the rotational shaft unit; and an air floating unit coupled to a portion of the door unit and spraying air upwards in a state in which the transfer space part is open to cause the substrate to float to be transferred. Since the substrate floating unit rotated together with the door unit is provided, the substrate can float to be transferred in a non-contacting manner, and thus, even though precipitate is produced, the precipitate does not come into direct contact with the substrate, preventing damage to the substrate. |
