| 摘要 |
PROBLEM TO BE SOLVED: To provide a dicing device capable of detecting the position of the tip of a blade with high accuracy while making the device configuration compact.SOLUTION: Blade position detectors 80A, 80B for detecting the position of the tip of dicing blades 64A, 64B are provided movably between a detection position close to a work table 30 and a retracted position spaced apart from the work table 30. The blade position detectors 80A, 80B are moved to the detection position only at the time of detection, otherwise located at the retracted position. |
