| 摘要 |
<p>PURPOSE:To easily conduct adjustment for rise and fall of impedance change level by providing a threshold value setting part with which a threshold value is set in the intermediate range between the first impedance value when a horn is microscopically oscillated and the second impedance value when a horn is microscopically oscillated and the second impedance value which is increased after earthing. CONSTITUTION:A supersonic vibrator 1 with which ultrasonic vibration is given to the horn 2 which retains a capillery 3, an ultrasonic oscillation circuit 8 with which an ultrasonic vibrator 1 is driven for microscopical oscillation after the earthing of the capillery 3, and an impedance detection circuit A, with which the change of the impedance of the ultrasonic vibrator 1 is detected, are provided in the earthing detector for wire bonder. On the above-mentioned earthing detector for wire bonder, the first impedance value of the microscopic oscillation of a horn 2 and the second impedance value, which is boosted from the first impedance value after earthing, are stored, and a threshold value setting part 11 and the like, with which the threshold value for detection of horn earthing is set between the first and the second impedance values, is provided.</p> |
