| 摘要 |
PROBLEM TO BE SOLVED: To suppress the surface oxidation of a reflection layer by cooling specified support down to specified temp. after deposition of an AlSi alloy-made reflection layer at specified support temp. and depositing a reflection-enhanced layer at specified support temp. which improves the rough surface of the AlSi reflection layer to provide a surface condition capable of displaying enough the light confining effect. SOLUTION: A support 100 is carried into a carrying vacuum chamber and deposition chamber, the back side of the support is closely contacted with a support heating heater to heat the support enough at 200-500 deg.C to generate an Ar plasma whereby an Ag light reflective layer 101 is formed. The support temp. is lowered below 100 deg.C in a support cooling gas atmosphere and then increased to 200-400 deg.C to generate an Ar plasma to form a surface reflection enhancing oxide layer 102 on the surface of the AlSi layer 101. This provides a surface condition capable of displaying enough the light confining effect of the reflective layer 101 and suppresses the surface oxidation of this layer enough to maintain a high reflectivity of the layer 101. |
