| 摘要 |
PURPOSE:To obtain large injection discharge power by a method wherein a cathode spot is uniformly dispersed on a cathode using a conductive resistor on an electrode itself, thereby enabling to prevent the concentration of glow discharge in the vicinity of the cathode. CONSTITUTION:The cathode 2 formed with a conductive resistor consists of a TiO2 film 4 formed by performing a plasma flame spray containing hydrogen, for example, on the surface of a metal tube 3. When DC voltage is applied between an anode 1 and a cathode 2, glow discharge is generated between them, a cathode spot 12 is formed on the surface of the cathode 2, and a positive column 13 is formed in vacant space. As the cathode 2 is formed by a conductive resistor, the electrode itself has balast resistance. To be more precise, when injected discharge power is small, the cathode spot 12 is limited to the region located in the vicinity of a trigger electrode 6, but the cathode spot spreads out on the circumference when the injection discharge power is increased, and the area of the cathode spot is increased, thereby enabling to accomplish a stabilized glow discharge even in the state wherein a large injection discharge power is present. |
