| 摘要 |
PURPOSE:To miniaturize the titled apparatus and to measure a flow amount without performing correction operation, by providing pressure taking-out holes respectively opened to two chambers formed by partitioning an apparatus main body and a coil shaped fine tube received in one chamber and opened to the other chamber. CONSTITUTION:Pressure taking-out holes 16, 17, which are respectively opened to the inlet side chamber 11 and an outlet side chamber 12 formed by partitioning the inner bore 2 of an apparatus main body 1 by a fine tube mount base 10, are provided to the wall of the main body 1. A stainless fine tube 18, for example, having a coil shape with an inner diameter of 0.58mm., a length of 2,000mm. and a wound-up diameter of 16mm. is received in the inlet side chamber 11 and attached thereto so that one end part thereof is pierced through the fine tube mount base 10 to be opened to a protector 15. Then, a flow amount is calculated on the basis of the pressure difference between gases taken out from both pressure taking-out holes 16, 17 proportional to the flow amount in the fine tube 18 according to an simple operation formula. By this method, the apparatus can be miniaturized and piping work is dispensed with to enable easy repairing work. |
