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发明名称
FORMATION OF THIN FILM OF RACEMIC COMPOUND
摘要
申请公布号
JPS6411962(A)
申请公布日期
1989.01.17
申请号
JP19870165706
申请日期
1987.07.01
申请人
NEC CORP
发明人
TANIGAKI KATSUMI
分类号
C23C14/24;C23C14/12
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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