Menetelmä bariumia ja strontiumia sisältävien oksidiohutkalvojen kasvattamiseksi
摘要
The present invention relates to a method for growing oxide thin films which contain barium and/or strontium. According to the method, such thin films are made by the ALE technique by using as precursors for barium and strontium their cyclopentadienyl compounds. A thin film made by means of the invention has a high permittivity and excellent conformality.
申请公布号
FI981959(A)
申请公布日期
2000.03.12
申请号
FI19980001959
申请日期
1998.09.11
申请人
MIKROKEMIA OY,,
发明人
LESKELAE,,MARKKU ANTERO;RITALA,,MIKKO KALERVO;HATANPAEAE,,TIMO TAPIO;HAENNINEN,,TIMO PEKKA;VEHKAMAEKI,,MARKO JUHANI
